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Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials Ingestion-build-54484 b) methods based on measurement

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b) methods based on measurement of stable isotopic ratio

It is not intended to test equipment which forms part of the main structure

Results of interlaboratory tests

you can use BS EN 4641-201 guidelines to improve the production of applications involving fibre optic cable

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials Ingestion-build-54484 b) methods based on measurement1 Scope This International Standard specifies a secondary ion mass spectrometric method for the determination of boron atomic concentration in single crystalline silicon using uniformly doped materials calibrated by a certified reference material implanted with boron. This method is applicable to uniformly doped boron in the concentration range from 1 1016 atoms cm3 to 1 1020 atoms cm3.

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