E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded orgで。初版は2003年3月に発行された。

orgで。初版は2003年3月に発行された。

SEMI D38-0304 (first published)

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E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded orgで。初版は2003年3月に発行された。1 Purpose 1. 1 The purpose is to provide guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below. 2 Scope 2. 1 The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s), and electrostatic discharge (ESD) on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment,