E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded 18-0914 (Reapproved 1125)

18-0914 (Reapproved 1125)

The flexibility provided by the GEM Standard also enables device manufacturers to implement unique automation solutions within a common industry framework

Only the ability to describe the fact that a supplier has implemented such a concept and that a Client can discover this implementation and any data it can produce is in scope for this Specification

The source is normally a polarized laser beam in combination with a high-contrast prism polarizer

E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded 18-0914 (Reapproved 1125)This Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e. g., semiconductor fabrication) factory. This Document