S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded Parameters such as edge length

Parameters such as edge length and diagonal of a wafer appear to be obvious

moisture ingress from non-sealed edge)

and example values necessary to build a full or constrained COO calculator

SEMI E142-0211 (Reapproved 1016)

S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded Parameters such as edge length2010122120112www. semiviews. orgwww. semi. org199820093 : (transferor)(transferee) (ESH) Referenced SEMI Standards SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S16 Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life