P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces All parts of the tube

All parts of the tube fittings tested by this method in contact with the internal fluid are made of fluorocarbon materials

terms used to describe the characteristics of the edge profile of silicon wafers are named and their meaning is illustrated by a schematic drawing

SEMI MF1528-94 (Reapproved 1999) (first SEMI publication)

注意：　本文書は，SEMI E54一連のスタンダードとして出版されず，単独で発行および販売される。

P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces All parts of the tubeThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 1, 2013. Available at www. semiviews. org and www. semi. org in June 2013; originally published November 2001; previously published November 2009. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not