M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded SEMI E140 — Guide to

SEMI E140 — Guide to Calculate Cost of Ownership Metrics for Gas Delivery Systems

SEMI F48-0600 (Reapproved 1214)

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Secondary ion mass spectrometry (SIMS) can measure on polished silicon wafer product the following:

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded SEMI E140 — Guide toThis Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which