E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 SEMI E30-1103E (editorial revision)

SEMI E30-1103E (editorial revision)

SEMI MF1726-1110 (technical revision)

but application to other wafer size equipment or non-wafer equipment may be appropriate and should be discussed by supplier and end-user

This Practice reveals strain fields arising from the presence of precipitates

E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 SEMI E30-1103E (editorial revision)This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications