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Historical World Fab Report (2012 - 2023) StdTpc-Radio Frequency Identification (RFID) NOTE 1: The design and

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NOTE 1: The design and fabrication of the sawing guides and the determination of any geometrical parameters is considered outside the scope of this Test Method

The mounting requirements in this Standard apply to the EUV exposure tools

This Test Method provides a common basis for communication between manufacturers and users

This Test Method is based on ASTM F1982

Historical World Fab Report (2012 - 2023) StdTpc-Radio Frequency Identification (RFID) NOTE 1: The design and

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