M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers StdPbc-1121 Ca含量的测定方法。
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Description
Ca含量的测定方法。
inspection criteria
more specific standards describing particular FPUs and their services may evolve
SEMI PV28 — Test Method for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge
M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers StdPbc-1121 Ca含量的测定方法。
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