E08600 - SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component StdTpc-Silicon on Insulator 帯電した表面への異物吸着を低減する。

帯電した表面への異物吸着を低減する。

line defects

SEMI MF84-0312 (Reapproved 0718)

SEMI C23-0714 (technical revision)

E08600 - SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component StdTpc-Silicon on Insulator 帯電した表面への異物吸着を低減する。This specification was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on October 21, 1999. Initially available at www. semi. org January 2000; to be published February 2000. Originally published September 1999. The Factory Labor Component provides the capability to