M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System Revision:SEMI M45-1110 - Superseded · Simultaneous transfer of Material

· Simultaneous transfer of Material and its Material Data between adjacent equipment

5-0302 (Reapproved 0217)

in the matrices of interest

SEMI E157-0611 (Reapproved 0616)

M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System Revision:SEMI M45-1110 - Superseded · Simultaneous transfer of MaterialThis Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in August 2017; originally published March 2001; previously published November 2010. This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm