E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded The scope of this Standard

The scope of this Standard is to define WJOBJ which represents WJ

This Standard presents recommendations for content and usability of documentation provided by the equipment supplier to the equipment purchaser for acquisition and use of semiconductor

It covers both conventional metal face sealing and surface mount gas delivery systems

本スタンダードは，直径450　mmのウェーハおよびクラスターツールモジュールの間のインタフェースにのみ適用される。例外として搬送モジュールは，インタフェース面を越えて操作されるがゆえにプロセスモジュール内のウェーハ搬送面の定義が必要となる。

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded The scope of this StandardThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions