F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems StdTpc-Lead Finishes SEMI T7 — Specification for

SEMI T7 — Specification for Back Surface Marking of Double-sided Polished Wafers with a Two-Dimensional Matrix Code Symbol

SEMI 3D14-0523 (technical revision)

These diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display manufacturing

在審查是否符合本基準時，應以本基準所提的所有要素作為判定依據。

F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems StdTpc-Lead Finishes SEMI T7 — Specification forThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been