E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn both at the equipment level

both at the equipment level and at the module level (e

The trimming width

This Document applies only to the following gases:

It intends to produce economic benefits for both manufacturers and equipment suppliers by identifying a subset of relevant functionalities out of the existing SEMI Communications Standards for the application in HB-LED manufacturing facilities

E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn both at the equipment levelGlobal Physical Interfaces & Carriers Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org199220047 2010 Referenced SEMI Standards SEMI E21 Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard